Positioning of Nanostructures

10094/TUB: Positioning of Nanostructures


The pre-patterning of a surface to obtain locally arranged nanostructures is usually achieved by using complex patterning techniques like the electron beam lithography, the focused ion beam etching or the ion implantation. But such direct surface patterning techniques can cause crystal damages and defects, thus reducing the quality and the performance of the nanostructured elements. Other disadvantages are that these techniques only have a short-range impact and that they are not fit for batch processing. A method for fabricating layer assemblies with locally arranged nanostructures is provided by this invention from TU Berlin. A buried, selectively modified underlying layer is used to control the growth of nanostructures on the surface by controlling the laterally inhomogeneous strain distribution. This is done using standard lithography, etching and oxidation techniques.

Anwendungsmöglichkeiten / Possible applications:

With this method light emitting devices can be built as well as single photon emitters. It also enables quantum cryptography and quantum communication.

Potential Industries:

  • Lighting
  • Information Technology
  • Nanoelectronics
  • Security Industry
Interested? Contact Us! Interested? Contact Us!
Show all techoffers Vorteile / Benefits:
  • Long-range impact
  • No defects in close vicinity of the nanostructures
  • Use of conventional structuring methods
  • Electrical addressing of single nanostructures
  • Creation of nanostructures even on unstructured surfaces
  • Compatible with existing devices
Entwicklungsstand / Development status:


Reifegrad / Maturity level:


Schlagworte / Tags:
buried layer, LED, nanostructures, single photon emitter
Schutzrechte / Property rights:

US - granted; EP - pending

Patentinhaber / Patent holder:

Technische Universität Berlin

Möglichkeiten der Zusammenarbeit / Possible cooperation:
  • R&D Cooperation
  • Patent Purchase
  • Licensing

Ansprechpartnerin / Contact Person:
Ina Krüger

Tel.: 030 314-75916
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